5

Formation of PTFE-like films in CF4 microwave plasmas

Year:
2010
Language:
english
File:
PDF, 696 KB
english, 2010
7

Modelling and Simulation of the Advanced Plasma Source

Year:
2011
Language:
english
File:
PDF, 899 KB
english, 2011
20

Plasma-Aided Nanofabrication

Year:
2008
Language:
english
File:
PDF, 67 KB
english, 2008